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9N超純氣體純化器

系列型號

適用氣體

原料氣指標

產品氣指標

N₂

H₂

O₂

Ar

He

O₂

H₂O

CO₂

CO

CH₄

H₂

N₂

顆粒度

9VV

●

●

●

●

●

5N

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

—

≤0.1ppb

—

0.003μm

9OVV

●

—

●

●

●

5N

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

—

0.003μm

9VVX

—

—

—

●

●

5N

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

0.003μm

—

●

—

—

—

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

—

≤0.1ppb

0.003μm

9X

—

—

—

●

●

5N

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

0.003μm

—

●

—

—

—

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

≤0.1ppb

—

≤0.1ppb

0.003μm

注：常用流量規格：1-20000Nm³/h;常用壓力：1-20Mpa